Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15352952
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Filing Dt:
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11/16/2016
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Publication #:
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Pub Dt:
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06/29/2017
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Inventors:
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Sejin Oh, Je-Hun Woo, Chungho Cho, Dougyong Sung, Jang Gyoo Yang, Jaechul Jung
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Title:
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PLASMA SYSTEM, PLASMA PROCESSING METHOD, AND PLASMA ETCHING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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129, SAMSUNG-RO,YEONGTONG-GU, GYEONGGI-DO |
SUWON-SI, KOREA, REPUBLIC OF |
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ONELLO & MELLO LLP |
THREE BURLINGTON WOODS DRIVE |
SUITE 203 |
BURLINGTON, MA 01803-4532 |
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05/03/2024 04:53 AM
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