Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15380979
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Filing Dt:
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12/15/2016
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Publication #:
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Pub Dt:
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06/29/2017
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Inventors:
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Tuqiang Ni, Dee Wu, Rason Zuo, Sha Rin
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Title:
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MULTI-ZONE ACTIVE-MATRIX TEMPERATURE CONTROL SYSTEM AND TEMPERATURE CONTROL METHOD, AND ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS APPLY THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA), PUDONG |
| SHANGHAI, CHINA 201201 |
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| NIXON PEABODY LLP |
| P.O. BOX 60610 |
| PALO ALTO, CA 94306 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 188 TAIHUA ROAD JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) |
| SHANGHAI, 201201 PUDONG, CHINA |
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| DANIEL M. GURFINKEL |
| DENNEMEYER & ASSOCIATES, LLC. |
| 2 NORTH RIVERSIDE PLAZA, SUITE 1500 |
| CHICAGO, IL 60606 |
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