Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/26/2019
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Application #:
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15304996
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Filing Dt:
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10/18/2016
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Publication #:
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Pub Dt:
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07/06/2017
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Inventors:
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Kazuo KOHMURA, Yosuke ONO, Daiki TANEICHI, Yasuyuki SATO, Toshiaki HIROTA
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Title:
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PELLICLE FRAME, PELLICLE AND METHOD OF MANUFACTURING THE SAME, ORIGINAL PLATE FOR EXPOSURE AND METHOD OF MANUFACTURING THE SAME, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-2, HIGASHI-SHIMBASHI 1-CHOME |
| MINATO-KU, TOKYO, JAPAN 105-7122 |
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| BUCHANAN, INGERSOLL & ROONEY PC |
| P.O. BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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