Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/12/2019
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Application #:
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15390902
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Filing Dt:
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12/27/2016
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Publication #:
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Pub Dt:
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07/13/2017
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Inventors:
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Jiro Higashijima, Nobuhiro Ogata, Yusuke Hashimoto
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-6325, JAPAN |
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| ABELMAN, FRAYNE & SCHWAB/LEE |
| 666 THIRD AVENUE |
| 10TH FLOOR |
| NEW YORK, NY 10017-5621 |
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