Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/06/2018
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Application #:
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15003385
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Filing Dt:
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01/21/2016
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Publication #:
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Pub Dt:
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07/27/2017
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Inventors:
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Jonghoon Baek, Mathew Cheeran Abraham, David Robert Evans, Jack Michael Gazza
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Title:
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SYSTEM, METHOD AND APPARATUS FOR TARGET MATERIAL DEBRIS CLEANING OF EUV VESSEL AND EUV COLLECTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501, 5504 DR |
| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| GEORGE B. LEAVELL, ESQ. |
| 710 LAKEWAY DRIVE, SUITE 200 |
| SUNNYVALE, CA 94085 |
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