Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15402110
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Filing Dt:
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01/09/2017
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Publication #:
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Pub Dt:
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08/03/2017
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Inventors:
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GUANGJIE YUAN, JUNQING ZHOU, HAIYANG ZHANG
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Title:
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APPARATUS AND METHOD FOR FORMING METAL BY HOT-WIRE ASSISTED CLEANING AND ATOMIC LAYER DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 18 ZHANG JIANG ROAD |
| PUDONG NEW AREA |
| SHANGHAI, CHINA 201203 |
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| 18 WEN CHANG ROAD, ECONOMICAL-TECHNOLOGICAL |
| DEVELOPMENT AREA, DAXING DISTRICT |
| BEIJING, CHINA 100176 |
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| KILPATRICK TOWNSEND AND STOCKTON LLP |
| TWO EMBARCADERO CENTER |
| EIGHTH FLOOR |
| SAN FRANCISCO, CA 94111-3834 |
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