Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/07/2020
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Application #:
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15592730
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Filing Dt:
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05/11/2017
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Publication #:
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Pub Dt:
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08/31/2017
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Inventors:
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Atsuki Fukazawa, Shinya Ueda, SeungJu Chun, YoonKi Min, JongWan Choi, Dai Ishikawa et al
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Title:
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METHOD FOR FORMING SILICON NITRIDE FILM SELECTIVELY ON SIDEWALLS OR FLAT SURFACES OF TRENCHES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS 1322 AP |
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| SNELL & WILMER LLP |
| 400 E. VAN BUREN |
| ONE ARIZONA CENTER |
| PHOENIX, AZ 85004 |
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