Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/23/2018
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Application #:
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15061769
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Filing Dt:
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03/04/2016
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Publication #:
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Pub Dt:
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09/07/2017
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Inventors:
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Junghoon KIM, Soonam PARK, Tae Seung CHO, Soonwook JUNG, Dmitry LUBOMIRSKY
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Title:
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IN-SITU SPATIALLY RESOLVED PLASMA MONITORING BY USING OPTICAL EMISSION SPECTROSCOPY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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PATTERSON & SHERIDAN, LLP |
24 GREENWAY PLAZA, SUITE 1600 |
HOUSTON, TX 77046 |
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