Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/25/2020
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Application #:
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15471291
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Filing Dt:
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03/28/2017
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Publication #:
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Pub Dt:
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09/28/2017
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Inventors:
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Daping Yao, Kenric Choi, Xiaoxiong Yuan, Jiang Lu, Can Xu, Mei Chang, Paul F. Ma
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Title:
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Apparatus And Methods To Remove Residual Precursor Inside Gas Lines Post-Deposition
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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SERVILLA WHITNEY LLC |
33 WOOD AVENUE SOUTH |
SUITE 830 |
ISELIN, NJ 08830 |
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