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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
15623733
Filing Dt:
06/15/2017
Publication #:
Pub Dt:
10/19/2017
Inventors:
Richard S. Svrluga, Sean R. Kirkpatrick
Title:
METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY AND ARTICLES PRODUCED THEREBY
Assignment: 1
Reel/Frame:
044878/0782Recorded: 02/09/2018Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/15/2018
Exec Dt:
01/15/2018
Assignee:
20 FORTUNE DRIVE
BILLERICA, MASSACHUSETTS 01821
Correspondent:
BURNS & LEVINSON LLP
125 SUMMER STREET
BOSTON, MA 02110

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