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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
10804078
Issue Dt:
10/13/2020
Application #:
15488232
Filing Dt:
04/14/2017
Publication #:
20170309452
Pub Dt:
10/26/2017
Inventors:
Yutaka FUJINO, Tomohito KOMATSU, Taro IKEDA, Jun NAKAGOMI, Takeo WAKUTSU
Title:
PLASMA PROCESSING APPARATUS AND GAS INTRODUCTION MECHANISM
Assignment: 1
Reel/Frame:
042017/0396Recorded: 04/14/2017Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
FUJINO, YUTAKA
Exec Dt:
03/31/2017
KOMATSU, TOMOHITO
Exec Dt:
03/31/2017
IKEDA, TARO
Exec Dt:
03/31/2017
NAKAGOMI, JUN
Exec Dt:
03/31/2017
WAKUTSU, TAKEO
Exec Dt:
03/31/2017
Assignee:
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME
MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
TELF C/O MURABITO HAO AND BARNES, LLP
TWO NORTH MARKET STREET
THIRD FLOOR
SAN JOSE, CA 95113

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