Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/02/2018
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Application #:
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15591197
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Filing Dt:
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05/10/2017
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Publication #:
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Pub Dt:
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11/16/2017
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Inventor:
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Shinji KUBOTA
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-1, AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107-6325 |
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ROTHWELL, FIGG, ERNST & MANBECK, P.C. |
607 14TH STREET, N.W. |
SUITE 800 |
WASHINGTON, DC 20005 |
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