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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/12/2021
Application #:
15599197
Filing Dt:
05/18/2017
Publication #:
Pub Dt:
11/23/2017
Inventors:
Donis G. Flagello, Stephen P. Renwick, Michael B. Binnard, David M. Williamson et al
Title:
EUV LITHOGRAPHY SYSTEM FOR DENSE LINE PATTERNING
Assignment: 1
Reel/Frame:
043686/0041Recorded: 09/25/2017Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/22/2017
Exec Dt:
09/20/2017
Exec Dt:
09/20/2017
Exec Dt:
09/20/2017
Exec Dt:
09/20/2017
Assignee:
SHINAGAWA INTERCITY TOWER C
2-15-3, KONAN, MINATO-KU
TOKYO, JAPAN 108-6290
Correspondent:
QUARLES & BRADY LLP
ONE SOUTH CHURCH AVENUE, SUITE 1700
TUCSON, AZ 85701

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