Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/21/2019
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Application #:
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15629353
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Filing Dt:
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06/21/2017
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Publication #:
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Pub Dt:
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11/23/2017
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Inventors:
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Michael B. Binnard, Daniel Gene Smith, David M. Williamson
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Title:
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EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM THAT UTILIZES PATTERN STITCHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SHINAGAWA INTERCITY TOWER C, 2-15-13 |
| KONAN, MINATO-KU |
| TOKYO, JAPAN 108-6290 |
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| STEVEN G. ROEDER / ROEDER & BRODER LLP |
| 13400 SABRE SPRINGS PKWY. |
| SUITE 155 |
| SAN DIEGO, CA 92128 |
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