Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/25/2020
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Application #:
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15620318
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Filing Dt:
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06/12/2017
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Publication #:
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Pub Dt:
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11/30/2017
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Inventors:
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Jeffrey W. ELAM, Seth B. DARLING, Yu-Chih TSENG
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Title:
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SEQUENTIAL INFILTRATION SYNTHESIS FOR ENHANCING MULTIPLE-PATTERNING LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5801 S. ELLIS AVENUE |
| CHICAGO, ILLINOIS 60637 |
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| MATTHEW E. MARTIN/FOLEY & LARDNER LLP |
| 321 N. CLARK STREET |
| SUITE 2800 |
| CHICAGO, IL 60654 |
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Assignment:
2
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 1000 INDEPENDENCE AVE. S.W. |
| WASHINGTON, DISTRICT OF COLUMBIA 20585 |
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| TIMOTHY L HARNEY |
| 9800 S. CASS AVE |
| IPLD |
| LEMONT, IL 60439 |
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