Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/17/2018
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Application #:
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15697954
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Filing Dt:
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09/07/2017
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Publication #:
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Pub Dt:
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01/04/2018
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Inventors:
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Takanobu ISHIHARA, Tsukasa HORI, Yutaka SHIRAISHI, Takashi SAITO
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Title:
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CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 400, OAZA YOKOKURASHINDEN, OYAMA-SHI |
| TOCHIGI, JAPAN 323-8558 |
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| STUDEBAKER & BRACKETT PC |
| 8255 GREENSBORO DRIVE |
| SUITE 300 |
| TYSONS, VA 22102 |
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