Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/26/2020
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Application #:
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15645521
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Filing Dt:
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07/10/2017
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Publication #:
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Pub Dt:
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01/11/2018
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Inventors:
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Norihiko AMIKURA, Yohei SAWADA, Atsushi SAWACHI, Kouji NISHINO, Yoshiharu KISHIDA
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Title:
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GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING SYSTEM AND GAS SUPPLY METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| STUDEBAKER & BRACKETT PC |
| 8255 GREENSBORO DRIVE |
| SUITE 300 |
| TYSONS, VA 22102 |
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