Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/26/2019
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Application #:
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15645462
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Filing Dt:
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07/10/2017
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Publication #:
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Pub Dt:
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01/18/2018
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Inventors:
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Sakae Matsuzaki, Ken Togashi, Noriko Ito, Kenji Furuta
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Title:
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ELECTROSTATIC CHUCK TABLE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 13-11, OMORI-KITA 2-CHOME, OTA-KU, |
| TOKYO, JAPAN 143-8580 |
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| GREER, BURNS & CRAIN, LTD |
| 300 S. WACKER DR. |
| SUITE 2500 |
| CHICAGO, IL 60606 |
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