Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/29/2020
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Application #:
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15416408
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Filing Dt:
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01/26/2017
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Publication #:
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Pub Dt:
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01/25/2018
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Inventors:
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Keum Seok Park, Sun Jung Kim, Yi Hwan Kim, Pan Kwi Park, Dong Suk Shin, Hyun Kwan Yu et al
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Title:
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Precleaning Apparatus and Substrate Processing System
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 129, SAMSUNG-RO, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 16677 |
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| MYERS BIGEL, P.A. |
| PO BOX 37428 |
| RALEIGH, NC 27627 |
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