Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/04/2020
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Application #:
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15640053
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Filing Dt:
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06/30/2017
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Publication #:
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Pub Dt:
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01/25/2018
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Inventors:
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Edward Augustyniak, David French, Sunil Kapoor, Yukinori Sakiyama, George Thomas
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Title:
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CONTROL OF WAFER BOW IN MULTIPLE STATIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE PENILLA GROUP, LLP |
| NISH V. PATEL |
| 710 LAKEWAY DRIVE, SUITE 200 |
| SUNNYVALE, CA 94085 |
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