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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
NONE
Issue Dt:
Application #:
15671867
Filing Dt:
08/08/2017
Publication #:
20180047543
Pub Dt:
02/15/2018
Inventors:
David Setton, Dan Marohl, Shen Peng, Gautam Bhattacharyya, Andras Kuthi
Title:
SYSTEMS AND METHODS FOR RF POWER RATIO SWITCHING FOR ITERATIVE TRANSITIONING BETWEEN ETCH AND DEPOSITION PROCESSES
Assignment: 1
Reel/Frame:
043404/0854Recorded: 08/25/2017Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
SETTON, DAVID
Exec Dt:
08/07/2017
MAROHL, DAN
Exec Dt:
08/08/2017
PENG, SHEN
Exec Dt:
08/07/2017
BHATTACHARYYA, GAUTAM
Exec Dt:
08/07/2017
KUTHI, ANDRAS
Exec Dt:
08/25/2017
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
HARNESS, DICKEY & PIERCE, P.L.C.
P.O. BOX 828
BLOOMFIELD HILLS, MI 48303
Assignment: 2
Reel/Frame:
045529/0993Recorded: 03/08/2018Pages: 7
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE APPLICATION NUMBER PREVIOUSLY RECORDED AT REEL: 043404 FRAME: 0854. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Assignors:
SETTON, DAVID
Exec Dt:
08/07/2017
MAROHL, DAN
Exec Dt:
08/08/2017
PENG, SHEN
Exec Dt:
08/07/2017
BHATTACHARYYA, GAUTAM
Exec Dt:
08/07/2017
KUTHI, ANDRAS
Exec Dt:
08/25/2017
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
HARNESS, DICKEY & PIRECE, P.L.C.
P.O. BOX 828
BLOOMFIELD HILLS, MI 48303

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