Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/19/2019
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Application #:
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15258397
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Filing Dt:
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09/07/2016
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Publication #:
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Pub Dt:
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03/08/2018
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Inventors:
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Rafal Dylewicz, Reinhold Schwazenbacher, Xia Man, Kenichi Sano, David Lou, Milan Pliska
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Title:
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REDUCTION OF SURFACE AND EMBEDDED SUBSTRATE CHARGE BY CONTROLLED EXPOSURE TO VACUUM ULTRAVIOLET (VUV) LIGHT IN LOW-OXYGEN ENVIRONMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SEZ STRASSE 1 |
| VILLACH, AUSTRIA A-9500 |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 828 |
| BLOOMFIELD HILLS, MI 48303 |
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