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Patent Assignment Abstract of Title
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Total Assignments: 3
Patent #:
9995569
Issue Dt:
06/12/2018
Application #:
15568118
Filing Dt:
10/20/2017
Publication #:
20180080757
Pub Dt:
03/22/2018
Inventors:
Ming Zhang, Rong Cheng, Feng Liu, Fan Zhi, Anlin Chen, Yujing Song, Dengfeng Xu, Yu Zhu et al
Title:
SIX-DEGREE-OF-FREEDOM DISPLACEMENT MEASUREMENT METHOD FOR EXPOSURE REGION ON SILICON WAFER STAGE
Assignment: 1
Reel/Frame:
044278/0286Recorded: 12/01/2017Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ZHU, YU
Exec Dt:
11/20/2017
ZHANG, MING
Exec Dt:
11/20/2017
CHEN, ANLIN
Exec Dt:
11/20/2017
CHENG, RONG
Exec Dt:
11/20/2017
YANG, KAIMING
Exec Dt:
11/20/2017
LIU, FENG
Exec Dt:
11/20/2017
SONG, YUJING
Exec Dt:
11/20/2017
ZHI, FAN
Exec Dt:
11/20/2017
HU, JINCHUN
Exec Dt:
11/20/2017
XU, DENGFENG
Exec Dt:
11/20/2017
MU, HAIHUA
Exec Dt:
11/20/2017
HU, CHUXIONG
Exec Dt:
11/20/2017
Assignees:
TSINGHUA UNIVERSITY
POST BOX 100084 BRANCH 82
TSINGHUA UNIVERSITY, PATENT OFFICE
HAIDIAN DISTRICT, BEIJING, CHINA 100084
BEJING U-PRECISION TECH CO., LTD.
ROOM B1009
XUEYAN PLAZA, TUSPARK
HAIDIAN DISTRICT, BEIJING, CHINA 100084
Correspondent:
HOWARD & HOWARD ATTORNEYS PLLC
450 WEST FOURTH STREET
ROYAL OAK, MI 48067
Assignment: 2
Reel/Frame:
044938/0980Recorded: 12/21/2017Pages: 7
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAME PREVIOUSLY RECORDED AT REEL: 044278 FRAME: 0286. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT .
Assignors:
ZHU, YU
Exec Dt:
11/20/2017
ZHANG, MING
Exec Dt:
11/20/2017
CHEN, ANLIN
Exec Dt:
11/20/2017
CHENG, RONG
Exec Dt:
11/20/2017
YANG, KAIMING
Exec Dt:
11/20/2017
LIU, FENG
Exec Dt:
11/20/2017
SONG, YUJING
Exec Dt:
11/20/2017
ZHI, FAN
Exec Dt:
11/20/2017
HU, JINCHUN
Exec Dt:
11/20/2017
XU, DENGFENG
Exec Dt:
11/20/2017
MU, HAIHUA
Exec Dt:
11/20/2017
HU, CHUXIONG
Exec Dt:
11/20/2017
Assignees:
TSINGHUA UNIVERSITY
POST BOX 100084 BRANCH 82
TSINGHUA UNIVERSITY, PATENT OFFICE
HAIDIAN DISTRICT, BEIJING, JAPAN 100084
BEIJING U-PRECISION TECH CO., LTD.
ROOM B1009
XUEYAN PLAZA, TUSPARK
HAIDIAN DISTRICT, BEIJING, JAPAN 100084
Correspondent:
HOWARD & HOWARD ATTORNEYS PLLC
450 WEST FOURTH STREET
ROYAL OAK, MI 48067
Assignment: 3
Reel/Frame:
046115/0741Recorded: 05/09/2018Pages: 8
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEES' COUNTRY NAME PREVIOUSLY RECORDED AT REEL: 044938 FRAME: 0980. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Assignors:
ZHU, YU
Exec Dt:
11/20/2017
ZHANG, MING
Exec Dt:
11/20/2017
CHEN, ANLIN
Exec Dt:
11/20/2017
CHENG, RONG
Exec Dt:
11/20/2017
YANG, KAIMING
Exec Dt:
11/20/2017
LIU, FENG
Exec Dt:
11/20/2017
SONG, YUJING
Exec Dt:
11/20/2017
ZHI, FAN
Exec Dt:
11/20/2017
HU, JINCHUN
Exec Dt:
11/20/2017
XU, DENGFENG
Exec Dt:
11/20/2017
MU, HAIHUA
Exec Dt:
11/20/2017
HU, CHUXIONG
Exec Dt:
11/20/2017
Assignees:
TSINGHUA UNIVERSITY
POST BOX 100084 BRANCH 82
TSINGHUA UNIVERSITY, PATENT OFFICE
HAIDIAN DISTRICT, BEIJING, CHINA 100084
BEIJING U-PRECISION TECH CO., LTD.
ROOM B1009
XUEYAN PLAZA, TUSPARK
HAIDIAN DISTRICT, BEIJING, CHINA 100084
Correspondent:
HOWARD & HOWARD ATTORNEYS PLLC
450 WEST FOURTH STREET
ROYAL OAK, MI 48067

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