Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/21/2018
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Application #:
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15696213
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Filing Dt:
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09/06/2017
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Publication #:
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Pub Dt:
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03/22/2018
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Inventors:
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Masao SASAKI, Kazutoshi YOSHIBAYASHI, Kenji SATO, Kenzou MURATA
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Title:
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HEATING APPARATUS, SUBSTRATE HEATING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-5-1, KURIGI, ASAO-KU |
| KAWASAKI-SHI, KANAGAWA-KEN, JAPAN |
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| BUCHANAN INGERSOLL & ROONEY |
| PO BOX 1404 |
| ALEXANDRIA, VA 22314-2727 |
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