Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/05/2020
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Application #:
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15562841
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Filing Dt:
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09/28/2017
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Publication #:
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Pub Dt:
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04/19/2018
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Inventors:
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Takumi TOIDA, Masatoshi ECHIGO, Takashi SATO, Youko SHIMIZU
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Title:
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RESIST BASE MATERIAL, RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-2, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8324 |
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| FITCH EVEN TABIN & FLANNERY, LLP |
| 120 SOUTH LASALLE STREET |
| SUITE 1600 |
| CHICAGO, IL 60603-3406 |
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