Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/01/2019
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Application #:
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15841167
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Filing Dt:
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12/13/2017
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Publication #:
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Pub Dt:
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04/19/2018
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Inventors:
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Kazuyuki Hagiwara, Akira Fujimura, Robert C. Pack
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Title:
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METHOD AND SYSTEM FOR DIMENSIONAL UNIFORMITY USING CHARGED PARTICLE BEAM LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4040 MOORPARK AVENUE, #250 |
| SAN JOSE, CALIFORNIA 95117 |
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| GRACE Y. SCHULZ |
| THE MUELLER LAW OFFICE, P.C. |
| 12707 HIGH BLUFF DRIVE, SUITE 200 |
| SAN DIEGO, CA 92130 |
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