Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/12/2018
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Application #:
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15726120
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Filing Dt:
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10/05/2017
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Publication #:
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Pub Dt:
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04/19/2018
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Inventors:
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Zhongkui TAN, Hua XIANG, Wenbing HU, Qing XU, Qian FU
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Title:
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SILICON OXIDE SILICON NITRIDE STACK ION-ASSISTED ETCH
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER LAW GROUP LLP |
| P.O. BOX 51887 |
| PALO ALTO, CA 94303 |
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