Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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10/08/2019
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Application #:
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15340512
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Filing Dt:
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11/01/2016
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Publication #:
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Pub Dt:
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05/03/2018
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Inventors:
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Atsuki Fukazawa, Masaki Tokunaga, Masaru Zaitsu, Hideaki Fukuda
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Title:
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METHOD OF SUBATMOSPHERIC PLASMA-ENHANCED ALD USING CAPACITIVELY COUPLED ELECTRODES WITH NARROW GAP
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS 1322 AP |
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| SNELL & WILMER L.L.P. (ASM JAPAN) |
| ONE ARIZONA CENTER |
| 400 EAST VAN BUREN STREET |
| PHOENIX, AZ 85004-2202 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS 1322 AP |
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| SNELL & WILMER LLP |
| 400 E. VAN BUREN |
| ONE ARIZONA CENTER |
| PHOENIX, AZ 85004 |
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