Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/20/2020
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Application #:
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15867559
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Filing Dt:
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01/10/2018
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Publication #:
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Pub Dt:
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05/17/2018
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Inventors:
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Kenneth S. Collins, Jason A. Kenney, Shahid Rauf, James D. Carducci, Richard Fovell et al
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Title:
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Symmetrical Plural-Coil Plasma Source with Side Rf Feeds and Rf Distribution Plates
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE M/S 1269 |
| SANTA CLARA, CALIFORNIA 95054 |
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| DAVID J. GOREN |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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