Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/29/2020
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Application #:
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15360412
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Filing Dt:
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11/23/2016
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Publication #:
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Pub Dt:
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05/24/2018
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Inventors:
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Srinivas D. Nemani, Gautam Pisharody, Seshadri Ramaswami, Shambhu N. Roy et al
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Title:
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ELECTROSTATIC CHUCKING FORCE MEASUREMENT TOOL FOR PROCESS CHAMBER CARRIERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| BLAKELY SOKOLOFF TAYLOR & ZAFMAN LLP |
| 1279 OAKMEAD PARKWAY |
| SUNNYVALE, CA 94085-4040 |
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