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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
10976025
Issue Dt:
04/13/2021
Application #:
15895868
Filing Dt:
02/13/2018
Publication #:
20180172240
Pub Dt:
06/21/2018
Inventors:
Ilya Bezel, Eugene Shifrin, Matthew Derstine, Anant Chimmalgi, Rudolf Brunner et al
Title:
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source
Assignment: 1
Reel/Frame:
044918/0370Recorded: 02/13/2018Pages: 13
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BEZEL, ILYA
Exec Dt:
02/11/2013
SHCHEMELININ, ANATOLY
Exec Dt:
02/11/2013
SHIFRIN, EUGENE
Exec Dt:
02/14/2012
PANZER, MATTHEW
Exec Dt:
02/12/2013
DERSTINE, MATTHEW
Exec Dt:
03/12/2013
WANG, JINCHENG
Exec Dt:
03/04/2013
CHIMMALGI, ANANT
Exec Dt:
03/06/2013
PATIL, RAJEEV
Exec Dt:
02/27/2013
BRUNNER, RUDOLF
Exec Dt:
02/27/2013
Assignee:
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE
MILPITAS, CALIFORNIA 95035
Correspondent:
SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER
14301 FNB PARKWAY
SUITE 220
OMAHA, NE 68154-5299
Assignment: 2
Reel/Frame:
055518/0027Recorded: 03/08/2021Pages: 3
Conveyance:
CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
Assignor:
KLA-TENCOR CORPORATION
Exec Dt:
06/19/2019
Assignee:
KLA CORPORATION
ONE TECHNOLOGY DRIVE
MILPITAS, CALIFORNIA 95035
Correspondent:
SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER
14301 FNB PARKWAY, SUITE 220
OMAHA, NE 68154

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