Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/25/2018
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Application #:
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15800215
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Filing Dt:
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11/01/2017
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Publication #:
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Pub Dt:
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06/21/2018
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Inventors:
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Shang-Chieh Chien, Jye-Fu Jeng, Shih-Chang Shih, Kun-Jin Wu, Guan-Heng Liu et al
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Title:
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EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH DEBRIS TRAPPER ON EXHAUST LINE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN RD. 6 |
| HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| HAYNES AND BOONE, LLP IP SECTION |
| 2323 VICTORY AVENUE |
| SUITE 700 |
| DALLAS, TX 75219 |
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