Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/26/2019
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Application #:
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15408326
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Filing Dt:
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01/17/2017
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Publication #:
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Pub Dt:
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07/19/2018
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Inventors:
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Zhongkui Tan, Yiting Zhang, Qian Fu, Qing Xu, Ying Wu, Saravanapriyan Sriraman et al
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Title:
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Near-Substrate Supplemental Plasma Density Generation with Low Bias Voltage within Inductively Coupled Plasma Processing Chamber
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| KENNETH D. WRIGHT |
| 710 LAKEWAY DRIVE |
| SUITE 200 |
| SUNNYVALE, CA 94085 |
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