Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/01/2021
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Application #:
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15747921
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Filing Dt:
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01/26/2018
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Publication #:
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Pub Dt:
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08/09/2018
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Inventors:
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Norihiro Ito, Jiro Higashijima, Nobuhiro Ogata, Takahisa Otsuka, Yuichi Douki et al
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Title:
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| PEARNE & GORDON LLP |
| 1801 EAST 9TH STREET |
| SUITE 1200 |
| CLEVELAND, OH 44114-3108 |
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