Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15751719
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Filing Dt:
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02/09/2018
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Publication #:
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Pub Dt:
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08/16/2018
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Inventors:
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Se Jin JANG, Sang-Do LEE, Sung Woo CHO, Sung Gi KIM, Byeong-il YANG, Myong Woon KIM et al
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Title:
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METHOD FOR MANUFACTURING SILICON NITRIDE THIN FILM USING PLASMA ATOMIC LAYER DEPOSITION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 142, DAEHWA-RO 132BEON-GIL |
| DAEDEOK-GU |
| DAEJEON, KOREA, REPUBLIC OF 34366 |
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| MCCOY RUSSELL LLP |
| 806 SW BROADWAY |
| SUITE 600 |
| PORTLAND, OR 97205-3335 |
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