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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
10446404
Issue Dt:
10/15/2019
Application #:
15873108
Filing Dt:
01/17/2018
Publication #:
20180233374
Pub Dt:
08/16/2018
Inventors:
Masahiro HATAKEYAMA, Kiwamu TSUKAMOTO, Shoji YOSHIKAWA, Kenji TERAO, Ryo TAJIMA et al
Title:
ELECTRON-BEAM IRRADIATED AREA ADJUSTMENT METHOD AND ADJUSTMENT SYSTEM, ELECTRON-BEAM IRRADIATED REGION CORRECTION METHOD, AND ELECTRON BEAM IRRADIATION APPARATUS
Assignment: 1
Reel/Frame:
045081/0261Recorded: 01/17/2018Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TAJIMA, RYO
Exec Dt:
10/04/2017
HATAKEYAMA, MASAHIRO
Exec Dt:
10/04/2017
SUEMATSU, KENICHI
Exec Dt:
10/04/2017
TSUKAMOTO, KIWAMU
Exec Dt:
10/04/2017
WATANABE, KENJI
Exec Dt:
10/04/2017
YOSHIKAWA, SHOJI
Exec Dt:
10/04/2017
OKADA, SHINICHI
Exec Dt:
10/04/2017
TERAO, KENJI
Exec Dt:
10/04/2017
Assignee:
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU
TOKYO, JAPAN 144-8510
Correspondent:
PEARNE & GORDON LLP
1801 EAST 9TH STREET
SUITE 1200
CLEVELAND, OH 44114-3108

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