Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/14/2019
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Application #:
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15518100
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Filing Dt:
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04/10/2017
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Publication #:
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Pub Dt:
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09/06/2018
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Inventors:
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Korehito KATO, Yoshinao TAKAHASHI
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Title:
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ETCHING GAS COMPOSITION FOR SILICON COMPOUND, AND ETCHING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-105, KANDA-AWAJICHO |
| CHIYODA-KU, TOKYO, JAPAN 101-0063 |
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| BROWDY AND NEIMARK, PLLC |
| 1625 K STREET, N,W. |
| SUITE 1100 |
| WASHINGTON, DC 20006 |
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