Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/10/2020
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Application #:
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15921506
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Filing Dt:
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03/14/2018
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Publication #:
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Pub Dt:
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09/20/2018
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Inventors:
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Shigeyuki OKURA, Yuki KEIMOTO
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Title:
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SUBSTRATE PROCESSING METHOD THAT INCLUDES STEP OF INTRODUCING BALLAST GAS TO EXHAUST LINE WHILE SUPPLYING PROCESSING GAS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| TELF C/O MURABITO HAO AND BARNES, LLP |
| TWO NORTH MARKET STREET |
| THIRD FLOOR |
| SAN JOSE, CA 95113 |
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