Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/16/2019
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Application #:
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15461417
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Filing Dt:
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03/16/2017
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Publication #:
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Pub Dt:
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09/20/2018
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Inventors:
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Jun Qian, Purushottam Kumar, Adrien LaVoie, You Zhai, Jeremiah Baldwin, Sung Je Kim
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Title:
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SYSTEMS AND METHODS FOR FLOW MONITORING IN A PRECURSOR VAPOR SUPPLY SYSTEM OF A SUBSTRATE PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| HARNESS DICKEY & PIERCE, P.L.C. |
| P.O. BOX 828 |
| BLOOMFIELD HILLS, MI 48303 |
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