Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/28/2019
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Application #:
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15977718
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Filing Dt:
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05/11/2018
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Publication #:
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Pub Dt:
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09/20/2018
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Inventors:
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Konstantin Makhratchev, Hamid Noorbakhsh, Douglas A. Buchberger JR., Vijay D. Parkhe et al
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Title:
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ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CROSSTALK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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LOWENSTEIN SANDLER LLP / AMAT PATENT DOC |
ONE LOWENSTEIN DRIVE |
ROSELAND, NJ 07068 |
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