Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15946696
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Filing Dt:
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04/05/2018
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Publication #:
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Pub Dt:
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10/11/2018
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Inventors:
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Hideki ITO, Takanori HAYANO, Tatsuhiko IIJIMA
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Title:
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ABNORMALITY DETECTION METHOD FOR PREDICTING A TIMING OF BREAKAGE OF A HEATER FOR HEATING A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, |
KANAGAWA, JAPAN 235-8522 |
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RANKIN, HILL & CLARK LLP |
23755 LORAIN ROAD, SUITE 200 |
NORTH OLMSTED, OH 44070 |
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05/06/2024 05:13 PM
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