Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15928806
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Filing Dt:
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03/22/2018
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Publication #:
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Pub Dt:
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10/11/2018
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Inventors:
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Hiromitsu TANAKA, Junya SUZUKI, Ryuichi SERIZAWA, Yuusuke OOTSUBO
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Title:
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COMPOSITION FOR FORMING SILICON-CONTAINING FILM FOR EUV LITHOGRAPHY, SILICON-CONTAINING FILM FOR EUV LITHOGRAPHY, AND PATTERN-FORMING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 9-2, HIGASHI-SHINBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| OBLON, MCCLELLAND, MAIER & NEUSTADT, LLP |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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