Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/05/2021
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Application #:
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15961395
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Filing Dt:
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04/24/2018
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Publication #:
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Pub Dt:
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11/01/2018
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Inventors:
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Yasushi Taniyama, Toshimitsu Morihana
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Title:
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GAS SUPPLY DEVICE, METHOD FOR CONTROLLING GAS SUPPLY DEVICE, LOAD PORT, AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-30, SHIBA-DAIMON 1-CHOME, MINATO-KU |
| TOKYO, JAPAN 105-8564 |
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| WESTERMAN, HATTORI, DANIELS & ADRIAN, LL |
| 8500 LEESBURG PIKE |
| SUITE 7500 |
| TYSONS, VA 22182 |
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