Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/29/2020
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Application #:
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15954995
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Filing Dt:
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04/17/2018
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Publication #:
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Pub Dt:
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11/08/2018
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Inventors:
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Jin LIAN, Nitesh PANDEY
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Title:
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Method of Measuring a Parameter of Interest, Device Manufacturing Method, Metrology Apparatus, and Lithographic System
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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