Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/10/2019
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Application #:
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15987755
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Filing Dt:
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05/23/2018
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Publication #:
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Pub Dt:
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12/06/2018
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Inventors:
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Masaru Zaitsu, Nobuyoshi Kobayashi, Akiko Kobayashi, Masaru Hori, Takayoshi Tsutsumi
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Title:
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METHOD OF ATOMIC LAYER ETCHING USING HYDROGEN PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8, 1322 AP |
| ALMERE, NETHERLANDS |
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| SNELL & WILMER L.L.P. |
| 400 EAST VAN BUREN STREET, SUITE 1900 |
| ONE ARIZONA CENTER |
| PHOENIX, AZ 85004-2202 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8, 1322 AP |
| ALMERE, NETHERLANDS |
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| SNELL & WILMER L.L.P. |
| 400 EAST VAN BUREN STREET, SUITE 1900 |
| ONE ARIZONA CENTER |
| PHOENIX, AZ 85004-2202 |
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04/29/2024 07:20 PM
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