Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/25/2020
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Application #:
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16019392
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Filing Dt:
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06/26/2018
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Publication #:
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Pub Dt:
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12/27/2018
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Inventors:
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Aurélien FAY, Jacky CHARTOIRE
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Title:
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CALIBRATION OF ELEMENTARY SMALL PATTERNS IN VARIABLE-SHAPED-BEAM ELECTRON-BEAM LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 25, RUE LEBLANC |
| BÂTIMENT "LE PONANT D" |
| PARIS, FRANCE 75015 |
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| BAKER & HOSTETLER LLP |
| WASHINGTON SQUARE, SUITE 1100 |
| 1050 CONNECTICUT AVENUE, N.W. |
| WASHINGTON, DC 20036 |
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