Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/07/2020
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Application #:
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16025560
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Filing Dt:
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07/02/2018
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Publication #:
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Pub Dt:
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01/10/2019
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Inventors:
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Yuya SASAKI, Toshiya CHIBA, Junnosuke TAGUCHI
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Title:
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SUBSTRATE WARPING MONITORING DEVICE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME, AND SUBSTRATE WARPING MONITORING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU |
| TOKYO, JAPAN 1076325 |
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| NATH, GOLDBERG & MEYER |
| 112 SOUTH WEST STREET |
| 35937U |
| ALEXANDRIA, VA 22314 |
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