Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16000109
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Filing Dt:
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06/05/2018
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Publication #:
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Pub Dt:
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01/17/2019
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Inventors:
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Xing Lin, Fei Wang, Bubesh Babu Jotheeswaran, Peipei Gao, John Tolle, Vish Ramanathan et al
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Title:
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APPARATUS AND METHOD FOR REMOVAL OF OXIDE AND CARBON FROM SEMICONDUCTOR FILMS IN A SINGLE PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS 1322 AP |
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| SNELL & WILMER L.L.P. |
| 400 EAST VAN BUREN STREET, SUITE 1900 |
| ONE ARIZONA CENTER |
| PHOENIX, AZ 85004-2202 |
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