Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/04/2021
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Application #:
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15665027
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Filing Dt:
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07/31/2017
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Publication #:
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Pub Dt:
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01/31/2019
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Inventors:
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Anshuman Cherala, Mario Johannes Meissl, Byung-Jin Choi
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Title:
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REAL-TIME CORRECTION OF TEMPLATE DEFORMATION IN NANOIMPRINT LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN |
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| HEATHER L. FLANAGAN |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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