Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/23/2020
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Application #:
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16068811
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Filing Dt:
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07/09/2018
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Publication #:
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Pub Dt:
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02/07/2019
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Inventors:
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Akinobu HORITA, Kenji SHIMADA, Kenichi TAKAHASHI, Aya ITO, Toshiyuki OIE
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Title:
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WET ETCHING COMPOSITION FOR SUBSTRATE HAVING SiN LAYER AND Si LAYER AND WET ETCHING METHOD USING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-2, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8324 |
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| OBLON, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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